A scanning AC calorimetry technique for the analysis of nano-scale quantities of materials.

We present a scanning AC nanocalorimetry method that enables calorimetry measurements at heating and cooling rates that vary from isothermal to 2 × 10(3) K/s, thus bridging the gap between traditional scanning calorimetry of bulk materials and nanocalorimetry. The method relies on a micromachined nanocalorimetry sensor with a serpentine heating element that is sensitive enough to make measurements on thin-film samples and composition libraries. The ability to perform calorimetry over such a broad range of scanning rates makes it an ideal tool to characterize the kinetics of phase transformations or to explore the behavior of materials far from equilibrium. We demonstrate the technique by performing measurements on thin-film samples of Sn, In, and Bi with thicknesses ranging from 100 to 300 nm. The experimental heat capacities and melting temperatures agree well with literature values. The measured heat capacities are insensitive to the applied AC frequency, scan rate, and heat loss to the environment over a broad range of experimental parameters.